Make:Vacutech System
Model:C4HT / Keysight B2902B
- Capabilities
Year: 2018
Chamber Volume: Approx.. 70 L
RF Power: Max 300W with attached auto tuner
DC power: Max 1000 V
Substrate Heater: Max 300°C
- Applications
- Thin Film Metallization
- Gold (Au), Silver (Ag), Copper (Cu), Aluminum (Al), and Tungsten (W) coatings.
Reflective & Decorative Coatings:- Mirror coatings (Al, Ag) for optics, solar panels, and decorative hardware.
- SiO2, Al2O3, HfO2, TiO2 for capacitors, MOS devices, and passivation layers.
- ZnO, CdS, Ga2O3, and other oxide semiconductors for photovoltaics and sensors.
- Charges
| S. No. | Experiment Details | UG /PG Students from Academic Institutions (in INR) | Research Scholar from Academic Institution (in INR) | Project Staff from Academic Institution (in INR) | Faculty Members from Academic Institutions (in INR) | Research Scientist from R&D Organizations (in INR) | Industry Personnel from Industry (in INR) |
|---|---|---|---|---|---|---|---|
| 1 | DC & RF Magnetron Sputtering (5 hours per slot) | 500 | 1500 | 1500 | 1500 | 1500 | 3000 |
* Charges for per sample in INR (+ applicable GST)
- Location
Room No.: 402- Technology Tower,
High Temperature lab
Centre for Functional Materials,
Vellore Institute of Technology (VIT), Vellore.
- Contact
Dr.Ramesh M Thamankar
402 Technology Tower
Centre for Functional Materials (CFM),
Vellore Institute of Technology – Vellore Campus,
Thiruvalam Road, Vellore – 632 014, Tamil Nadu, India.
Office Phone: +91 – 416 – 220 2353
Email id: rameshm.thamankar@vit.ac.in
Instrument email ID: cfm.dcrf@vit.ac.in