Probe Station with Source Meter Unit

Probe Station with Source Meter Unit

Make:EverBeing Int'l

Model:C4HT / Keysight B2902B

Probe Station:

  • Make: EverBeing Int’l;
  • Model: C4HT
  • Micropositioners :4 probes with magnetic-lock-based
  • Probe:Tungsten tips of 5µm diameter
  • Temperatures: RT – 200°C(Heatable vacuum chuck)
  • Optical microscope: Magnification: 150x;
  • Camera: Moticam 8MP

Source Measurement Unit (SMU) –

  • Model:Keysight B2902B
  • Voltage range: ±210 V
  • Current range:±3 A DC, ±10.5A pulsed
  • Accuracy: 0.015%
  • Source and measurement
  • Resolution : 10 fA and 100 nV
  • DC Electrical Characterization
    Measuring I–V, C–V, and resistance on wafers, dies, or packaged devices.
    RF / High-Frequency Measurements
    With RF probes, supports S-parameter, impedance, and signal Integrity tests.
    Temperature-Dependent Testing
    With hot chuck (up to ~200 °C), enables study of device behavior vs. temperature.
    Low-Noise / Shielded Measurements
    Optional shielding boxes allow probing of ultra-low Current/voltage devices.
S. No.Experiment DetailsUG /PG Students from Academic Institutions (in INR)Research Scholar from Academic Institution (in INR)Project Staff from Academic Institution (in INR)Faculty Members from Academic Institutions (in INR)Research Scientist from R&D Organizations (in INR)Industry Personnel from Industry (in INR)
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* Charges for per sample in INR (+ applicable GST)

Room No.: 402- Technology Tower,
Device Characterisation Laboratory
Centre for Functional Materials,
Vellore Institute of Technology (VIT), Vellore.

Dr.AnKur Rastogi
402 Technology Tower
Device Characterisation Laboratory
Centre for Functional Materials (CFM),
Vellore Institute of Technology – Vellore Campus,
Thiruvalam Road, Vellore – 632 014, Tamil Nadu, India.

Office Phone: +91 – 416 – 220 2353
Instrument email ID: cfm.pssmu@vit.ac.in