DC & RF Magnetron Sputtering

Home Facilities DC & RF Magnetron Sputtering

Make: Vacutech System

Model:

Year: 2018
Chamber Volume: Approx.. 70 L
RF Power: Max 300W with attached auto tuner
DC power: Max 1000 V
Substrate Heater: Max 300°C
Thin Film Metallization
  • Gold (Au), Silver (Ag), Copper (Cu), Aluminum (Al), and Tungsten (W) coatings.
Used in microelectronics, interconnects, and contacts.
Reflective & Decorative Coatings:
  • Mirror coatings (Al, Ag) for optics, solar panels, and decorative hardware.
Dielectric & Insulating Films :
  • SiO2, Al2O3, HfO2, TiO2 for capacitors, MOS devices, and passivation layers.
Semiconducting Films :
  • ZnO, CdS, Ga2O3, and other oxide semiconductors for photovoltaics and sensors.
Room No.: 402- Technology Tower,
High Temperature lab
Centre for Functional Materials,
Vellore Institute of Technology (VIT), Vellore.
Dr.Ramesh M Thamankar
402 Technology Tower
Centre for Functional Materials (CFM),
Vellore Institute of Technology - Vellore Campus,
Thiruvalam Road, Vellore – 632 014, Tamil Nadu, India.

Office Phone: +91 – 416 – 220 2353
Email id: rameshm.thamankar@vit.ac.in
Instrument email ID: Yet to receive
S. No. Experiment Details UG /PG Students from Academic Institutions (in INR) Research Scholar from Academic Institution (in INR) Project Staff from Academic Institution (in INR) Faculty Members from Academic Institutions (in INR) Research Scientist from R&D Organizations (in INR) Industry Personnel from Industry (in INR)
1 DC & RF Magnetron Sputtering (5 hours per slot) 500 1500 1500 1500 1500 3000

* Charges for per sample in INR (+ applicable GST)